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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiNx MIS structure
Type:
Journal
Info:
physica status solidi (a) Volume 214, Issue 8, pages 1600726
Date:
2017-04-25
Author Information
| Name | Institution |
|---|---|
| Myoung-Jin Kang | Seoul National University |
| Minseong Lee | Seoul National University |
| Gwang-Ho Choi | Seoul National University |
| Il-Hwan Hwang | Seoul National University |
| Ho-Young Cha | Hongik University |
| Kwang-Seok Seo | Seoul National University |
Films
Film/Plasma Properties
Substrates
| GaN |
| AlGaN |
| Si3N4 |
Keywords
Notes
| 1088 |