The publication database currently has 1603 entries.
Search from:
200 Films Compositions
271 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
85 Theses
Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Search 1603 plasma ALD publications by:
Search 1603 plasma ALD publications by:
High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiNx MIS structure
Type:
Journal
Info:
physica status solidi (a) Volume 214, Issue 8, pages 1600726
Date:
2017-04-25
Author Information
| Name | Institution |
|---|---|
| Myoung-Jin Kang | Seoul National University |
| Minseong Lee | Seoul National University |
| Gwang-Ho Choi | Seoul National University |
| Il-Hwan Hwang | Seoul National University |
| Ho-Young Cha | Hongik University |
| Kwang-Seok Seo | Seoul National University |
Films
Film/Plasma Properties
Substrates
| GaN |
| AlGaN |
| Si3N4 |
Keywords
Notes
| 1088 |