Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Publication Information
Title:
High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiNx MIS structure
Type:
Journal
Info:
physica status solidi (a) Volume 214, Issue 8, pages 1600726
Date:
2017-04-25
Author Information
Name | Institution |
---|---|
Myoung-Jin Kang | Seoul National University |
Minseong Lee | Seoul National University |
Gwang-Ho Choi | Seoul National University |
Il-Hwan Hwang | Seoul National University |
Ho-Young Cha | Hongik University |
Kwang-Seok Seo | Seoul National University |
Films
Film/Plasma Properties
Substrates
GaN |
AlGaN |
Si3N4 |
Keywords
Notes
1088 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |