2021 Year in Review
The publication database currently has 1616 entries.
Search from:
202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
250 Film and Plasma Characteristics
88 Theses
Use Advanced Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Recent Database Additions
Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
Search 1616 plasma ALD publications by:
Search 1616 plasma ALD publications by:
High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiNx MIS structure
Type:
Journal
Info:
physica status solidi (a) Volume 214, Issue 8, pages 1600726
Date:
2017-04-25
Author Information
| Name | Institution |
|---|---|
| Myoung-Jin Kang | Seoul National University |
| Minseong Lee | Seoul National University |
| Gwang-Ho Choi | Seoul National University |
| Il-Hwan Hwang | Seoul National University |
| Ho-Young Cha | Hongik University |
| Kwang-Seok Seo | Seoul National University |
Films
Film/Plasma Properties
Substrates
| GaN |
| AlGaN |
| Si3N4 |
Keywords
Notes
| 1088 |