Minseong Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Minseong Lee returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Improvement of Vth Instability in Normally-Off GaN MIS-HEMTs Employing PEALD-SiNx as an Interfacial Layer
2High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiNx MIS structure
3Impacts of conduction band offset and border traps on Vth instability of gate recessed normally-off GaN MIS-HEMTs