Publication Information

Title: Distribution and coverage of 40 nm gold nano-particles on aluminum and hafnium oxide using electrophoretic method and fabricated MOS structures

Type: Journal

Info: Materials Research Bulletin 86 (2017) 302-307

Date: 2016-10-15

DOI: https://doi.org/10.1016/j.materresbull.2016.10.032

Author Information

Name

Institution

Masdar Institute of Science and Technology Abu Dhabi

Masdar Institute of Science and Technology Abu Dhabi

Masdar Institute of Science and Technology Abu Dhabi

Films

Plasma Al2O3 using Unknown

Deposition Temperature = 200C

75-24-1

7782-44-7

Plasma HfO2 using Unknown

Deposition Temperature = 200C

352535-01-4

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Silicon

Keywords

Notes

926



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