2021 Year in Review
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203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
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90 Theses
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Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
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Enhancement of reliability and stability for transparent amorphous indium-zinc-tin-oxide thin film transistors
Type:
Journal
Info:
RSC Adv., 2016, 6, 106374-106379
Date:
2016-11-03
Author Information
| Name | Institution |
|---|---|
| Po-Tsun Liu | National Chiao Tung University |
| Chih-Hsiang Chang | National Chiao Tung University |
| Chur-Shyang Fuh | National Chiao Tung University |
Films
Film/Plasma Properties
Substrates
| ITO |
| IZTO |
Keywords
| Passivation |
Notes
| 936 |