Search 1528 plasma ALD publications by:
Search 1528 plasma ALD publications by:
Publication Information
Title:
Enhancement of reliability and stability for transparent amorphous indium-zinc-tin-oxide thin film transistors
Type:
Journal
Info:
RSC Adv., 2016, 6, 106374-106379
Date:
2016-11-03
Author Information
Name | Institution |
---|---|
Po-Tsun Liu | National Chiao Tung University |
Chih-Hsiang Chang | National Chiao Tung University |
Chur-Shyang Fuh | National Chiao Tung University |
Films
Film/Plasma Properties
Substrates
ITO |
IZTO |
Keywords
Passivation |
Notes
936 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |