Enhancement of reliability and stability for transparent amorphous indium-zinc-tin-oxide thin film transistors

Type:
Journal
Info:
RSC Adv., 2016, 6, 106374-106379
Date:
2016-11-03

Author Information

Name Institution
Po-Tsun LiuNational Chiao Tung University
Chih-Hsiang ChangNational Chiao Tung University
Chur-Shyang FuhNational Chiao Tung University

Films

Plasma Al2O3


Film/Plasma Properties

Substrates

ITO
IZTO

Notes

936