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Carbon content control of silicon oxycarbide film with methane containing plasma
Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
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Publication Information
Title:
Enhancement of reliability and stability for transparent amorphous indium-zinc-tin-oxide thin film transistors
Type:
Journal
Info:
RSC Adv., 2016, 6, 106374-106379
Date:
2016-11-03
Author Information
| Name | Institution |
|---|---|
| Po-Tsun Liu | National Chiao Tung University |
| Chih-Hsiang Chang | National Chiao Tung University |
| Chur-Shyang Fuh | National Chiao Tung University |
Films
Film/Plasma Properties
Substrates
| ITO |
| IZTO |
Keywords
| Passivation |
Notes
| 936 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |