Publication Information

Title:
Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
Type:
Journal
Info:
Applied Surface Science 252 (2006) 7878 - 7883
Date:
2005-09-25

Author Information

Name Institution
Gwangpyo ChoiJAMIC
L. SatyanarayanaChosun University
Jin-Seong ParkChosun University

Films

Plasma SnO2


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Gas Sensing
Analysis: Custom

Substrates

SiO2

Keywords

Notes

1301