2021 Year in Review
The publication database currently has 1616 entries.
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202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
250 Film and Plasma Characteristics
88 Theses
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Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
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Liquids on-chip: direct storage and release employing micro-perforated vapor barrier films
Type:
Journal
Info:
Lab Chip, 2015,15, 2887-2895
Date:
2015-05-25
Author Information
| Name | Institution |
|---|---|
| Daniel Czurratis | Robert Bosch GmbH |
| Yvonne Beyl | Robert Bosch GmbH |
| Alexander Grimm | Robert Bosch GmbH |
| Thomas Brettschneider | Robert Bosch GmbH |
| Sven Zinober | Robert Bosch GmbH |
| Franz Lärmer | Robert Bosch GmbH |
| Roland Zengerle | University of Freiburg |
Films
Film/Plasma Properties
Substrates
| Polycarbonate |
Keywords
Notes
| 501 |