Liquids on-chip: direct storage and release employing micro-perforated vapor barrier films

Type:
Journal
Info:
Lab Chip, 2015,15, 2887-2895
Date:
2015-05-25
DOI:
http://dx.doi.org/10.1039/C5LC00510H

Author Information

Name Institution
Daniel CzurratisRobert Bosch GmbH
Yvonne BeylRobert Bosch GmbH
Alexander GrimmRobert Bosch GmbH
Thomas BrettschneiderRobert Bosch GmbH
Sven ZinoberRobert Bosch GmbH
Franz LärmerRobert Bosch GmbH
Roland ZengerleUniversity of Freiburg

Films

Plasma Al2O3

Hardware used: Unknown
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Polycarbonate

Notes

501