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Publication Information

Title: Liquids on-chip: direct storage and release employing micro-perforated vapor barrier films

Type: Journal

Info: Lab Chip, 2015,15, 2887-2895

Date: 2015-05-25

DOI: http://dx.doi.org/10.1039/C5LC00510H

Author Information

Name

Institution

Daniel Czurratis

Robert Bosch GmbH

Yvonne Beyl

Robert Bosch GmbH

Alexander Grimm

Robert Bosch GmbH

Thomas Brettschneider

Robert Bosch GmbH

Sven Zinober

Robert Bosch GmbH

Franz Lärmer

Robert Bosch GmbH

Roland Zengerle

University of Freiburg

Films

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

TMA, Trimethyl Aluminum, Trimethylalane, Trimethylaluminium, Aluminium Trimethyl, Aluminum Trimethanide, Al(CH3)3, AlMe3, Al2(CH3)6, Al2Me6

75-24-1

Where to buy precursor

Oxygen, O2

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Polycarbonate

Keywords

Notes

501


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