Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Liquids on-chip: direct storage and release employing micro-perforated vapor barrier films
Type:
Journal
Info:
Lab Chip, 2015,15, 2887-2895
Date:
2015-05-25
Author Information
Name | Institution |
---|---|
Daniel Czurratis | Robert Bosch GmbH |
Yvonne Beyl | Robert Bosch GmbH |
Alexander Grimm | Robert Bosch GmbH |
Thomas Brettschneider | Robert Bosch GmbH |
Sven Zinober | Robert Bosch GmbH |
Franz Lärmer | Robert Bosch GmbH |
Roland Zengerle | University of Freiburg |
Films
Film/Plasma Properties
Substrates
Polycarbonate |
Keywords
Notes
501 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |