Junctionless Gate-All-Around pFETs Using In-situ Boron-Doped Ge Channel on Si
Type:
Journal
Info:
IEEE Transactions on Nanotechnology, (Volume:14, Issue:5)
Date:
2015-07-14
Author Information
| Name | Institution |
|---|---|
| I-Hsieh Wong | National Taiwan University |
| Yen-Ting Chen | National Taiwan University |
| Shih-Hsien Huang | National Taiwan University |
| Wen-Hsien Tu | National Taiwan University |
| Yu-Sheng Chen | National Taiwan University |
| Chee Wee Liu | National Taiwan University |
Films
Film/Plasma Properties
Substrates
| GeO2 |
Notes
| 498 |