Chee Wee Liu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chee Wee Liu returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
2Junctionless Gate-All-Around pFETs Using In-situ Boron-Doped Ge Channel on Si
3Passivation of Al2O3/TiO2 on monocrystalline Si with relatively low reflectance
4Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells


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