Yu-Sheng Chen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yu-Sheng Chen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors|
|2||Junctionless Gate-All-Around pFETs Using In-situ Boron-Doped Ge Channel on Si|