Publication Information

Title:
Performance of AlGaN/GaN MISHFET using dual-purpose thin Al2O3 layer for surface protection and gate insulator
Type:
Journal
Info:
Solid-State Electronics 100 (2014) 11-14
Date:
2014-05-24

Author Information

Name Institution
Do-Kywn KimKyungpook National University

Films

Plasma Al2O3

Hardware used: Unknown


Film/Plasma Properties

Substrates

Keywords

Notes

219