Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor
Type:
Conference Proceedings
Info:
IMID 2015 Digest
Date:
2015-08-19
Author Information
| Name | Institution |
|---|---|
| Kyoung Woo Park | Korea Advanced Institute of Science and Technology |
| Yun Yong Nam | Korea Advanced Institute of Science and Technology |
| Kwang Hum Lee | Korea Advanced Institute of Science and Technology |
| Gum Bi Mun | Korea Advanced Institute of Science and Technology |
| Jong Bum Ko | Korea Advanced Institute of Science and Technology |
| Hye In Yeom | Korea Advanced Institute of Science and Technology |
| Sang-Hee Ko Park | Korea Advanced Institute of Science and Technology |
Films
Film/Plasma Properties
Substrates
Notes
| 460 |