Gum Bi Mun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gum Bi Mun returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
2Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor
3High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition