Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.


Gum Bi Mun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gum Bi Mun returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
2Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor
3Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application