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Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2016, 8 (40), pp 26924-26931
Date:
2016-09-27
DOI:
http://dx.doi.org/10.1021/acsami.6b07332

Author Information

Name Institution
Hyo Yeon KimKorea Research Institute of Chemical Technology
Eun Ae JungKorea Research Institute of Chemical Technology
Gum Bi MunKorea Advanced Institute of Science and Technology
Raphael E. AgbenyekeKorea Research Institute of Chemical Technology
Bo Keun ParkKorea Research Institute of Chemical Technology
Jin-Seong ParkHanyang University
Seung Uk SonSungkyunkwan University
Dong Ju JeonKorea Research Institute of Chemical Technology
Sang-Hee Ko ParkSungkyunkwan University
Taek-Mo ChungKorea Research Institute of Chemical Technology
Jeong Hwan HanKorea Research Institute of Chemical Technology

Films

Plasma In2O3

Hardware used: Custom
dimethyl(N-ethoxy-2,2-dimethylcarboxylicpropanamide)indium (Me2In(EDPA))
CAS#: 0-0-0
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 70-250C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Horiba Jobin Yvon UVISEL

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: Rigaku Smartlab

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Rigaku Smartlab

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Veeco Dimension 3100

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Diagnostic: Shimadzu UV-1800

Characteristic: Optical Bandgap
Analysis: UV-VIS Spectroscopy
Diagnostic: Shimadzu UV-1800

Characteristic: Refractive Index
Analysis: UV-VIS Spectroscopy
Diagnostic: Shimadzu UV-1800

Characteristic: Carrier Concentration
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-5000

Characteristic: Mobility
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-5000

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-5000

Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Diagnostic: -

Characteristic: Precursor Characterization
Analysis: TGA, Thermo Gravimetric Analysis
Diagnostic: -

Substrates

Silicon
Glass

Notes

Precursor data in supporting document.
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