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In₂O₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing In₂O₃ films returned 14 record(s).

Number	Title
1	Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
2	Area-Selective Atomic Layer Deposition of In₂O₃:H Using a µ-Plasma Printer for Local Area Activation
3	High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
4	All-oxide thin-film transistors with channels of mixed InO_x-ZnO_y formed by plasma-enhanced atomic layer deposition process
5	Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy
6	On the determination of χ⁽²⁾ in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
7	Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
8	Low Temperature Atomic Layer Deposition of Crystalline In₂O₃ Films
9	Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
10	Antireflection In₂O₃ coatings of self-organized TiO₂ nanotube layers prepared by atomic layer deposition
11	High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
12	Plasma-induced sub-10nm Au-SnO₂-In₂O₃ heterostructures fabricated by atomic layer deposition for highly sensitive ethanol detection on ppm level
13	Atomic layer deposition of stoichiometric In₂O₃ films using liquid ethylcyclopentadienyl indium and combinations of H₂O and O₂ plasma
14	Oxide Vertical TFTs for the Application to the Ultra High Resolution Display