In₂O₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing In₂O₃ films returned 14 record(s).

Number	Title
1	Oxide Vertical TFTs for the Application to the Ultra High Resolution Display
2	Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
3	Plasma-induced sub-10nm Au-SnO2-In2O3 heterostructures fabricated by atomic layer deposition for highly sensitive ethanol detection on ppm level
4	Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
5	Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition
6	Atomic layer deposition of stoichiometric In2O3 films using liquid ethylcyclopentadienyl indium and combinations of H2O and O2 plasma
7	On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
8	Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation
9	Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
10	Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
11	High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
12	High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
13	Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
14	All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process