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In2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing In2O3 films returned 14 record(s).

NumberTitle
1Plasma-induced sub-10nm Au-SnO2-In2O3 heterostructures fabricated by atomic layer deposition for highly sensitive ethanol detection on ppm level
2All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
3Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
4Atomic layer deposition of stoichiometric In2O3 films using liquid ethylcyclopentadienyl indium and combinations of H2O and O2 plasma
5Oxide Vertical TFTs for the Application to the Ultra High Resolution Display
6On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
7Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
8High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
9Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation
10Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
11High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
12Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition
13Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
14Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors