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Atomic layer deposition of stoichiometric In2O3 films using liquid ethylcyclopentadienyl indium and combinations of H2O and O2 plasma

Type:
Journal
Info:
AIP ADVANCES 9, 045019 (2019)
Date:
2019-04-05
DOI:
http://dx.doi.org/10.1063/1.5081727

Author Information

Name Institution
Fumikazu MizutaniKojundo Chemical Laboratory Co., Ltd.
Shintaro HigashiKojundo Chemical Laboratory Co., Ltd.
Mari InoueNational Institute for Materials Science (NIMS)
Toshihide NabatameNational Institute for Materials Science (NIMS)

Films

Other In2O3

Hardware used: Picosun R200
InEtCp, Indium Ethyl Cyclopentadienyl
CAS#: 0-0-0
H2O, Water
CAS#: 7732-18-5
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-200C

Thermal In2O3

Hardware used: Picosun R200
InEtCp, Indium Ethyl Cyclopentadienyl
CAS#: 0-0-0
H2O, Water
CAS#: 7732-18-5
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-200C

Plasma In2O3

Hardware used: Picosun R200
InEtCp, Indium Ethyl Cyclopentadienyl
CAS#: 0-0-0
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-200C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry
Diagnostic: Ulvac-Phi TRIFT-II

Characteristic: Chemical Composition, Impurities
Analysis: GDOES, Glow Discharge Optical Emission Spectroscopy
Diagnostic: Horiba JY-5000RF

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: Kobe Steel HRBS500

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: Kobe Steel HRBS500

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000U

Characteristic: Precursor Characterization
Analysis: DSC, Differential Scanning Calorimetry
Diagnostic: Bruker AXS DSC 3120

Characteristic: Precursor Characterization
Analysis: TGA, Thermo Gravimetric Analysis
Diagnostic: Bruker AXS TG-DTA 2000S

Characteristic: Precursor Characterization
Analysis: Vapor Pressure
Diagnostic: Custom

Substrates

SiO2

Notes

Nice compilation of In2O3 ALD precursor references.
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