Inductively coupled plasma sources from Plasma ALD, LLC.


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Gum Bi Mun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gum Bi Mun returned 3 record(s).

NumberTitle
1Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
2High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
3Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor