September 2022 Stats

The publication database currently has 1652 entries.

204 Films

274 Precursors

77 Dep Hardware Sets

253 Characteristics

91 Theses

5082 Authors

Use Advanced Search for more complex searches

2021 Year in Review

Recent Database Additions

Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology Texture of atomic layer deposited ruthenium Comparative study of structural electrical dielectric and ferroelectric properties of HfO₂ deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET

Hye In Yeom Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hye In Yeom returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor
2	Effect of Plasma Power of Plasma Enhanced Atomic Layer Deposition Process for Gate Insulator Deposition in Top-Gate Thin-Film Transistors
3	High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
4	High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
5	Oxide Vertical TFTs for the Application to the Ultra High Resolution Display
6	Plasma-Enhanced Atomic Layer Deposition Processed Amorphous Indium Zinc Oxide Thin-Film Transistor for Ultra-High Definition Display Application