Publication Information

Title: Oxide Vertical TFTs for the Application to the Ultra High Resolution Display

Type: Journal

Info: 60-3: Distinguished Paper, 2016 SID Symposium Digest of Technical Papers

Date: 2016-05-25

DOI: http://dx.doi.org/10.1002/sdtp.10799

Author Information

Name

Institution

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

Electronics and Telecommunication Research Institute, (ETRI)

Electronics and Telecommunication Research Institute, (ETRI)

Electronics and Telecommunication Research Institute, (ETRI)

Films

Plasma In2O3 using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

788



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