Publication Information

Title:
Oxide Vertical TFTs for the Application to the Ultra High Resolution Display
Type:
Journal
Info:
60-3: Distinguished Paper, 2016 SID Symposium Digest of Technical Papers
Date:
2016-05-25

Author Information

Name Institution
Hye In YeomKorea Advanced Institute of Science and Technology
Geumbi MoonKorea Advanced Institute of Science and Technology
Yun Yong NamKorea Advanced Institute of Science and Technology
Jong Beom KoKorea Advanced Institute of Science and Technology
Seung-Hee LeeKorea Advanced Institute of Science and Technology
Junyong ChoeKorea Advanced Institute of Science and Technology
Jihoon ChoiElectronics and Telecommunication Research Institute, (ETRI)
Chi Sun HwangElectronics and Telecommunication Research Institute, (ETRI)
Sang-Hee Ko ParkElectronics and Telecommunication Research Institute, (ETRI)

Films

Plasma In2O3

Hardware used: Unknown


Film/Plasma Properties

Substrates

Keywords

Notes

788