In2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing In2O3 films returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
2Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition
3Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation
4Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
5Atomic layer deposition of stoichiometric In2O3 films using liquid ethylcyclopentadienyl indium and combinations of H2O and O2 plasma
6High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
7High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
8Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
9Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
10On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
11Oxide Vertical TFTs for the Application to the Ultra High Resolution Display