In2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing In2O3 films returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Oxide Vertical TFTs for the Application to the Ultra High Resolution Display
2Atomic layer deposition of stoichiometric In2O3 films using liquid ethylcyclopentadienyl indium and combinations of H2O and O2 plasma
3Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
4All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
5Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
6Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
7Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
8Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition
9High-Mobility Indium Oxide Thin-Film Transistors by Means of Plasma-Enhanced Atomic Layer Deposition
10High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
11Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
12On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
13Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation