Publication Information

Title: Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition

Type: Journal

Info: physica status solidi (RRL) - Rapid Research Letters Volume 9, Issue 9, pages 516--520, 2015

Date: 2015-08-31

DOI: http://dx.doi.org/10.1002/pssr.201510245

Author Information

Name

Institution

Jan M. Macak

University of Pardubice

Jan Prikryl

University of Pardubice

Hanna Sopha

University of Pardubice

Lukas Strizik

University of Pardubice

Films

Plasma In2O3 using Veeco - Ultratech - Cambridge NanoTech Fiji

Deposition Temperature = 250C

Cyclopentadienylindium(I), InCp

34822-89-4

Where to buy precursor

O2, Oxygen

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

420


Mark Sowa

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