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An economical, compact inductively coupled plasma source.

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Jan M. Macak Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jan M. Macak returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition