The publication database currently has 1573 entries.
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196 Films Compositions
265 Precursors and Plasma Gases
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242 Film and Plasma Characteristics
84 Theses
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Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
Search 1573 plasma ALD publications by:
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Charge effects of ultrafine FET with nanodot type floating gate
Type:
Conference Proceedings
Info:
2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)
Date:
2016-07-06
Author Information
| Name | Institution |
|---|---|
| T. Ban | Ryukoku University |
| S. Migita | National Institute of Advanced Industrial Science and Technology |
| Yukiharu Uraoka | Nara Institute of Science and Technology |
| S. I. Yamamoto | Ryukoku University |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
| 921 |