Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Charge effects of ultrafine FET with nanodot type floating gate
Type:
Conference Proceedings
Info:
2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)
Date:
2016-07-06
Author Information
Name | Institution |
---|---|
T. Ban | Ryukoku University |
S. Migita | National Institute of Advanced Industrial Science and Technology |
Yukiharu Uraoka | Nara Institute of Science and Technology |
S. I. Yamamoto | Ryukoku University |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
921 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |