Publication Information

Title:
Charge effects of ultrafine FET with nanodot type floating gate
Type:
Conference Proceedings
Info:
2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)
Date:
2016-07-06

Author Information

Name Institution
T. BanRyukoku University
S. MigitaNational Institute of Advanced Industrial Science and Technology
Yukiharu UraokaNara Institute of Science and Technology
S. I. YamamotoRyukoku University

Films

Plasma Al2O3


Film/Plasma Properties

Substrates

Keywords

Notes

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