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Yukiharu Uraoka Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yukiharu Uraoka returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
2Charge effects of ultrafine FET with nanodot type floating gate
3Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
4Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition
5Bias stress and humidity exposure of amorphous InGaZnO thin-film transistors with atomic layer deposited Al2O3 passivation using dimethylaluminum hydride at 200°C
6Leakage Current Reduction in ALD-Al2O3 Dielectric Deposited on Si by High Pressure Deuterium Oxide Annealing
7Dimethylaluminum hydride for atomic layer deposition of Al2O3 passivation for amorphous InGaZnO thin-film transistors