Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition
Type:
Journal
Info:
physica status solidi (c) Volume 10, Issue 11, pages 1426--1429, 2013
Date:
2013-09-25
Author Information
| Name | Institution |
|---|---|
| Koji Yoshitsugu | Nara Institute of Science and Technology |
| Masahiro Horita | Nara Institute of Science and Technology |
| Yasuaki Ishikawa | Nara Institute of Science and Technology |
| Yukiharu Uraoka | Nara Institute of Science and Technology |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements
Characteristic: Breakdown Voltage
Analysis: I-V, Current-Voltage Measurements
Characteristic: Band Gap
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
| GaN |
Notes
| 604 |