Yasuaki Ishikawa Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yasuaki Ishikawa returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Leakage Current Reduction in ALD-Al2O3 Dielectric Deposited on Si by High Pressure Deuterium Oxide Annealing
|Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition