JSW-Afty AFTEX-600 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using JSW-Afty AFTEX-600 hardware returned 3 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition
2Bias stress and humidity exposure of amorphous InGaZnO thin-film transistors with atomic layer deposited Al2O3 passivation using dimethylaluminum hydride at 200°C
3Dimethylaluminum hydride for atomic layer deposition of Al2O3 passivation for amorphous InGaZnO thin-film transistors