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JSW-Afty AFTEX-600 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using JSW-Afty AFTEX-600 hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition

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Mark Sowa

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