Search Plasma ALD Publication Database By...

Publication Information

Title: Spectroscopy and control of near-surface defects in conductive thin film ZnO

Type: Journal

Info: 2016 J. Phys.: Condens. Matter 28 094007

Date: 2015-10-09

DOI: http://dx.doi.org/10.1088/0953-8984/28/9/094007

Author Information

Name

Institution

University of Arizona

University of Arizona

National Renewable Energy Laboratory

Georgia Institute of Technology

Georgia Institute of Technology

Georgia Institute of Technology

National Renewable Energy Laboratory

National Renewable Energy Laboratory

King Abdullah University of Science and Technology

National Renewable Energy Laboratory

Georgia Institute of Technology

University of Arizona

Films

Plasma ZnO using Unknown

Deposition Temperature = 100C

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Substrates

Silicon

Keywords

Notes

525

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

Follow plasma-ald.com on Twitter

Follow @PlasmaALDGuy

Shortcuts



© 2014-2018 plasma-ald.com