Spectroscopy and control of near-surface defects in conductive thin film ZnO

Type:
Journal
Info:
2016 J. Phys.: Condens. Matter 28 094007
Date:
2015-10-09

Author Information

Name Institution
Leah L. KellyUniversity of Arizona
David A. RackeUniversity of Arizona
Philip SchulzNational Renewable Energy Laboratory
Hong LiGeorgia Institute of Technology
Paul WingetGeorgia Institute of Technology
Hyungchul (GaTech) KimGeorgia Institute of Technology
Paul F. NdioneNational Renewable Energy Laboratory
Ajaya K. SigdelNational Renewable Energy Laboratory
Jean-Luc BrédasKing Abdullah University of Science and Technology
Joseph J. BerryNational Renewable Energy Laboratory
Samuel GrahamGeorgia Institute of Technology
Oliver L. A. MontiUniversity of Arizona

Films

Plasma ZnO

Hardware used: Unknown


CAS#: 7782-44-7

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Substrates

Silicon

Notes

525