Electronic Conduction Mechanisms in Insulators

Type:
Journal
Info:
IEEE Transactions on Electron Devices, Volume:65, Issue:1, 2018
Date:
2017-11-18

Author Information

Name Institution
Tsung-Han ChiangOregon State University
John F. WagerOregon State University

Films

Plasma Al2O3

Hardware used: Unknown


Film/Plasma Properties

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements

Substrates

Silicon

Notes

1277