Search 1553 plasma ALD publications by:
Search 1553 plasma ALD publications by:
Publication Information
Title:
Electronic Conduction Mechanisms in Insulators
Type:
Journal
Info:
IEEE Transactions on Electron Devices, Volume:65, Issue:1, 2018
Date:
2017-11-18
Author Information
Name | Institution |
---|---|
Tsung-Han Chiang | Oregon State University |
John F. Wager | Oregon State University |
Films
Film/Plasma Properties
Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements
Substrates
Silicon |
Keywords
Notes
1277 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |