Publication Information

Title:
IrO2 Nanodot Formation by Plasma Enhanced Atomic Layer Deposition as a Charge Storage Layer
Type:
Journal
Info:
Journal of Nanoscience and Nanotechnology, Volume 14, Number 7, July 2014, pp. 5386-5389(4)
Date:
2014-07-01

Author Information

Name Institution
Deok-Kee KimSejong University

Films

Plasma IrO2


Film/Plasma Properties

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Substrates

Keywords

Notes

PEALD IrO2 nanodot charge storage layer for memory device.
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