Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Coupled used of SKP and C-V measurements to highlight the charge distribution and behavior in the Si/SiO2/Al2O3 stack for silicon solar cells surface passivation
Type:
Conference Proceedings
Info:
2015 European Materials Research Society Spring Meeting
Date:
2015-05-13
Author Information
Name | Institution |
---|---|
Matthieu Pawlik | Université Lille 1 |
F. Morini | University of Tours |
C. Sion | Université Lille 1 |
D. Aureau | Université de Versailles Saint-Quentin |
Arnaud Etcheberry | Université de Versailles Saint-Quentin |
E. Dubois | Université Lille 1 |
Jean-Pierre Vilcot | Université Lille 1 |
Films
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: SIMS, Secondary Ion Mass Spectrometry
Characteristic: Unknown
Analysis: Kelvin Probe (SPV) Surface PhotoVoltage Measurements
Characteristic: Unknown
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
Silicon |
Keywords
Solar |
Notes
440 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |