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Ideal for:
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  • Surface cleaning
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Lifetimes exceeding 1ms in 1-Ohm-cm boron-doped Cz-silicon

Type:
Journal
Info:
Solar Energy Materials and Solar Cells Volume 131, December 2014, Pages 51-57
Date:
2014-06-03
DOI:
http://dx.doi.org/10.1016/j.solmat.2014.06.011

Author Information

Name Institution
Dominic C. WalterInstitute for Solar Energy Research Hamelin (ISFH)

Films

Plasma Al2O3

Hardware used: Unknown
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Notes

216