Search 1553 plasma ALD publications by:
Search 1553 plasma ALD publications by:
Publication Information
Title:
Lifetimes exceeding 1ms in 1-Ohm-cm boron-doped Cz-silicon
Type:
Journal
Info:
Solar Energy Materials and Solar Cells Volume 131, December 2014, Pages 51-57
Date:
2014-06-03
Author Information
Name | Institution |
---|---|
Dominic C. Walter | Institute for Solar Energy Research Hamelin (ISFH) |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
216 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |