Publication Information

Title: Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries

Type: Journal

Info: Journal of Vacuum Science & Technology A 35, 01B137 (2017)

Date: 2016-12-07

DOI: http://dx.doi.org/10.1116/1.4972554

Author Information

Name

Institution

St. Petersburg State University

Peter the Great St.Petersburg Polytechnic University

Peter the Great St.Petersburg Polytechnic University

Peter the Great St.Petersburg Polytechnic University

Peter the Great St.Petersburg Polytechnic University

St. Petersburg State University

St. Petersburg State University

St. Petersburg State University

St. Petersburg State University

Ioffe Institute

Films

Thermal SnO2 using Unknown

Deposition Temperature Range = 150-300C

597-64-8

7722-84-1

Thermal SnO2 using Unknown

Deposition Temperature Range = 190-350C

597-64-8

10028-15-6

Thermal SnO2 using Unknown

Deposition Temperature Range = 250-300C

597-64-8

7732-18-5

Thermal SnO2 using Unknown

Deposition Temperature Range = 250-300C

597-64-8

7782-44-7

Deposition Temperature Range = 150-400C

597-64-8

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Novosibirsk Ellips-1891 SAG

Thickness

XRR, X-Ray Reflectivity

Bruker D8 Discover

Thickness

SEM, Scanning Electron Microscopy

Zeiss Merlin

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Bruker D8 Discover

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Zeiss AURIGA Cross-beam SEM-FIB

Thickness

SEM, Scanning Electron Microscopy

Zeiss AURIGA Cross-beam SEM-FIB

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific ESCA LAB 250 XPS Spectrometer

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Shimadzu EDX Series 800 HS

Substrates

Si(100)

Stainless Steel 316L

Keywords

Lithium-ion

Batteries

Notes

Solar-ML from Nanoengineering LTD might be the thermal deposition tool.

845



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