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Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 35, 01B137 (2017)
Date:
2016-12-07
DOI:
http://dx.doi.org/10.1116/1.4972554

Author Information

Name Institution
Denis V. NazarovSt. Petersburg State University
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University
Pavel A. NovikovPeter the Great St.Petersburg Polytechnic University
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University
Aleksey O. SilinPeter the Great St.Petersburg Polytechnic University
Vladimir M. SmirnovSt. Petersburg State University
Natalia P. BobryshevaSt. Petersburg State University
Olga M. OsmolovskayaSt. Petersburg State University
Michail G. OsmolovskySt. Petersburg State University
Aleksandr M. RumyantsevIoffe Institute

Films

Thermal SnO2

Hardware used: Unknown
Tetraethyl Tin, Tetraethyltin, Et4Sn, (CH3CH2)4Sn, (C2H5)4Sn
CAS#: 597-64-8
Hydrogen Peroxide, H2O2
CAS#: 7722-84-1
Deposition Temperature Range = 150-300C

Thermal SnO2

Hardware used: Unknown
Tetraethyl Tin, Tetraethyltin, Et4Sn, (CH3CH2)4Sn, (C2H5)4Sn
CAS#: 597-64-8
O3, Ozone
CAS#: 10028-15-6
Deposition Temperature Range = 190-350C

Thermal SnO2

Hardware used: Unknown
Tetraethyl Tin, Tetraethyltin, Et4Sn, (CH3CH2)4Sn, (C2H5)4Sn
CAS#: 597-64-8
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 250-300C

Thermal SnO2

Hardware used: Unknown
Tetraethyl Tin, Tetraethyltin, Et4Sn, (CH3CH2)4Sn, (C2H5)4Sn
CAS#: 597-64-8
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 250-300C

Plasma SnO2

Hardware used: Picosun SUNALE R-150B
Tetraethyl Tin, Tetraethyltin, Et4Sn, (CH3CH2)4Sn, (C2H5)4Sn
CAS#: 597-64-8
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 150-400C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Ellips-1891 SAG

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Merlin

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss AURIGA Cross-beam SEM-FIB

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss AURIGA Cross-beam SEM-FIB

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific ESCA LAB 250 XPS Spectrometer

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: Shimadzu EDX Series 800 HS

Substrates

Si(100)
Stainless Steel 316L

Notes

Solar-ML from Nanoengineering LTD might be the thermal deposition tool.
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