Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 35, 01B137 (2017)
Date:
2016-12-07

Author Information

Name Institution
Denis V. NazarovSt. Petersburg State University
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University
Pavel A. NovikovPeter the Great St.Petersburg Polytechnic University
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University
Aleksey O. SilinPeter the Great St.Petersburg Polytechnic University
Vladimir M. SmirnovSt. Petersburg State University
Natalia P. BobryshevaSt. Petersburg State University
Olga M. OsmolovskayaSt. Petersburg State University
Michail G. OsmolovskySt. Petersburg State University
Aleksandr M. RumyantsevIoffe Institute

Films

Thermal SnO2


Thermal SnO2


Thermal SnO2


Thermal SnO2


Plasma SnO2


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Substrates

Si(100)
Stainless Steel 316L

Keywords

Lithium-ion
Batteries

Notes

Solar-ML from Nanoengineering LTD might be the thermal deposition tool.
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