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Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 35, 01B137 (2017)
Date:
2016-12-07
Author Information
| Name | Institution |
|---|---|
| Denis V. Nazarov | St. Petersburg State University |
| Maxim Yu Maximov | Peter the Great St.Petersburg Polytechnic University |
| Pavel A. Novikov | Peter the Great St.Petersburg Polytechnic University |
| Anatoly A. Popovich | Peter the Great St.Petersburg Polytechnic University |
| Aleksey O. Silin | Peter the Great St.Petersburg Polytechnic University |
| Vladimir M. Smirnov | St. Petersburg State University |
| Natalia P. Bobrysheva | St. Petersburg State University |
| Olga M. Osmolovskaya | St. Petersburg State University |
| Michail G. Osmolovsky | St. Petersburg State University |
| Aleksandr M. Rumyantsev | Ioffe Institute |
Films
Plasma SnO2
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Substrates
| Si(100) |
| Stainless Steel 316L |
Notes
| Solar-ML from Nanoengineering LTD might be the thermal deposition tool. |
| 845 |