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  • Plasma-Enhanced Atomic Layer Deposition
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Anatoly A. Popovich Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Anatoly A. Popovich returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
2Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
3Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
4Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
5Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
6Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition