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Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
Type:
Journal
Info:
Coatings 2019, 9, 301
Date:
2019-05-01
Author Information
| Name | Institution |
|---|---|
| Yury Koshtyal | Peter the Great St.Petersburg Polytechnic University |
| Denis V. Nazarov | St. Petersburg State University |
| Ilya Ezhov | Peter the Great St.Petersburg Polytechnic University |
| Ilya Mitrofanov | Peter the Great St.Petersburg Polytechnic University |
| Artem Kim | Peter the Great St.Petersburg Polytechnic University |
| Aleksander Rymyantsev | Peter the Great St.Petersburg Polytechnic University |
| Oleksiy Lyutakov | Institute of Chemical Technology |
| Anatoly A. Popovich | Peter the Great St.Petersburg Polytechnic University |
| Maxim Yu Maximov | Peter the Great St.Petersburg Polytechnic University |
Films
Plasma NiOx
Plasma NiOx
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Characteristic: Uniformity
Analysis: Ellipsometry
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Adhesion
Analysis: AFM, Atomic Force Microscopy
Characteristic: Phase Contrast
Analysis: AFM, Atomic Force Microscopy
Characteristic: Conductivity
Analysis: AFM, Atomic Force Microscopy
Characteristic: Battery Properties
Analysis: CV, Cyclic Voltammetry
Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling
Substrates
| Si(111) |
| Stainless Steel 316L |
Notes
| 1529 |