Publication Information

Title:
Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
Type:
Journal
Info:
Coatings 2019, 9, 301
Date:
2019-05-01

Author Information

Name Institution
Yury KoshtyalPeter the Great St.Petersburg Polytechnic University
Denis V. NazarovSt. Petersburg State University
Ilya EzhovPeter the Great St.Petersburg Polytechnic University
Ilya MitrofanovPeter the Great St.Petersburg Polytechnic University
Artem KimPeter the Great St.Petersburg Polytechnic University
Aleksander RymyantsevPeter the Great St.Petersburg Polytechnic University
Oleksiy LyutakovInstitute of Chemical Technology
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University

Films

Plasma NiOx



Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Extinction Coefficient
Analysis: Ellipsometry

Characteristic: Uniformity
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Adhesion
Analysis: AFM, Atomic Force Microscopy

Characteristic: Phase Contrast
Analysis: AFM, Atomic Force Microscopy

Characteristic: Conductivity
Analysis: AFM, Atomic Force Microscopy

Characteristic: Battery Properties
Analysis: CV, Cyclic Voltammetry

Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling

Substrates

Si(111)
Stainless Steel 316L

Keywords

Batteries

Notes

1529