Your search for plasma enhanced atomic layer deposition publications authored by Maxim Yu Maximov returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries|
|2||Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries|
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