Picosun SUNALE R-150B Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Picosun SUNALE R-150B hardware returned 9 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
2A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
3Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
4Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
5MANOS performance dependence on ALD Al2O3 oxidation source
6Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
7Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
8Tribological properties of thin films made by atomic layer deposition sliding against silicon
9Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor


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