Publication Information

Title: Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries

Type: Journal

Info: ECS Meeting - 18th International Meeting on Lithium Batteries

Date: 2016-06-20

DOI: https://ecs.confex.com/ecs/imlb2016/webprogram/Paper79309.html

Author Information

Name

Institution

Peter the Great St.Petersburg Polytechnic University

Peter the Great St.Petersburg Polytechnic University

Peter the Great St.Petersburg Polytechnic University

Peter the Great St.Petersburg Polytechnic University

Peter the Great St.Petersburg Polytechnic University

Ioffe Institute

Films

Deposition Temperature Range = 250-350C

597-64-8

7782-44-7

Deposition Temperature Range = 250-350C

597-64-8

10028-15-6

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Horiba Jobin Yvon UVISEL

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Mira Tescan

Conductance

XPS, X-ray Photoelectron Spectroscopy

-

Substrates

Keywords

Batteries

Notes

Meeting abstract withdrawn.

776



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