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Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition

Type:
Conference Proceedings
Info:
Proceedings 11th International Conference on Nanomaterials - Research & Application Pages: 238-243
Date:
2019-10-16
DOI:
https://doi.org/10.37904/nanocon.2019.8612

Author Information

Name Institution
Yury KoshtyalPeter the Great St.Petersburg Polytechnic University
Ilya EzhovPeter the Great St.Petersburg Polytechnic University
Ilya MitrofanovPeter the Great St.Petersburg Polytechnic University
Artem KimPeter the Great St.Petersburg Polytechnic University
Denis V. NazarovPeter the Great St.Petersburg Polytechnic University
Aleksandr M. RumyantsevPeter the Great St.Petersburg Polytechnic University
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University

Films

Plasma LiNiOx

Hardware used: Picosun SUNALE R-150B
LiHMDS, Lithium hexamethyldisilazide, Lithium bis(trimethylsilyl)amide, LiN(SiMe3)2
CAS#: 4039-32-1
Bis(cyclopentadienyl)nickel, Nickelocene, Cp2Ni
CAS#: 1271-28-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Ellips-1891 SAG

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Diagnostic: Metrohm Autolab PGSTAT302

Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling
Diagnostic: Neware CT-3008W-5V10mA

Substrates

Si(111)
Stainless Steel 316L

Notes

1502