Publication Information

Title:
Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition
Type:
Conference Proceedings
Info:
Proceedings 11th International Conference on Nanomaterials - Research & Application Pages: 238-243
Date:
2019-10-16

Author Information

Name Institution
Yury KoshtyalPeter the Great St.Petersburg Polytechnic University
Ilya EzhovPeter the Great St.Petersburg Polytechnic University
Ilya MitrofanovPeter the Great St.Petersburg Polytechnic University
Artem KimPeter the Great St.Petersburg Polytechnic University
Denis V. NazarovPeter the Great St.Petersburg Polytechnic University
Aleksandr M. RumyantsevPeter the Great St.Petersburg Polytechnic University
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University

Films

Plasma LiNiOx


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry

Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling

Substrates

Si(111)
Stainless Steel 316L

Keywords

Notes

1502