Aleksandr M. Rumyantsev Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Aleksandr M. Rumyantsev returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
2Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition
3Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries