Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Applied Physics Letters 102, 012113 (2013)
Date:
2012-12-20
Author Information
Name | Institution |
---|---|
Jian Zhang | Zhejiang University |
Hui Yang | Zhejiang University |
Qi-long Zhang | Zhejiang University |
Shurong Dong | Zhejiang University |
J.K. Luo | Zhejiang University |
Films
Film/Plasma Properties
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Resistive Switching
Analysis: I-V, Current-Voltage Measurements
Substrates
Pt |
Keywords
Resistive Switch |
Resistance RAM |
Notes
632 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |