Multi-functional touch sensors with strained P(VDF-TrFE) deposited on metal oxide thin film transistor

Type:
Conference Proceedings
Info:
2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)
Date:
2016-07-06
DOI:
http://dx.doi.org/10.1109/AM-FPD.2016.7543668

Author Information

Name Institution
Taiyu JinKorea Advanced Institute of Science and Technology
Jeongjae RyuKorea Advanced Institute of Science and Technology
HanSaem KangLG Display Co. Ltd.
Kwangsoo NoKorea Advanced Institute of Science and Technology
Sang-Hee Ko ParkKorea Advanced Institute of Science and Technology

Films

Plasma Al2O3

Hardware used: Unknown
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

IGZO

Notes

952