Inductively coupled plasma sources from Plasma ALD, LLC.


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HanSaem Kang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by HanSaem Kang returned 2 record(s).

NumberTitle
1Multi-functional touch sensors with strained P(VDF-TrFE) deposited on metal oxide thin film transistor
246-2: Multi-Level-Pressure Touch Sensors with P(VDF-TrFE) Deposited on Metal Oxide Thin Film Transistor