The publication database currently has 1573 entries.
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196 Films Compositions
265 Precursors and Plasma Gases
76 Deposition Hardwares
242 Film and Plasma Characteristics
84 Theses
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Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
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Integrated Semiconductor/Catalyst Assemblies for Sustained Photoanodic Water Oxidation
Type:
Conference Proceedings
Info:
ECS Meeting Abstracts
Date:
2015-05-27
Author Information
| Name | Institution |
|---|---|
| Jinhui Yang | Lawrence Berkeley National Laboratory |
| Jason K. Cooper | Lawrence Berkeley National Laboratory |
| Francesca M. Toma | Lawrence Berkeley National Laboratory |
| Ian D. Sharp | Lawrence Berkeley National Laboratory |
Films
Plasma CoOx
Film/Plasma Properties
Characteristic: Unknown
Analysis: X-ray Absorption Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Unknown
Analysis: GIWAXS, Grazing Incidence Wide Angle X-ray Scattering
Characteristic: Unknown
Analysis: TEM, Transmission Electron Microscope
Substrates
| Silicon |
Keywords
| Solar |
| Photoelectrochemical (PEC) water splitting |
Notes
| 494 |