Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates

Type:
Conference Proceedings
Info:
2016 IEEE Workshop on Microelectronics and Electron Devices (WMED)
Date:
2016-04-15

Author Information

Name Institution
H. U. LiThe Pennsylvania State University
Thomas N. JacksonThe Pennsylvania State University

Films

Plasma Al2O3


Plasma ZnO


Film/Plasma Properties

Characteristic: Mobility
Analysis: -

Substrates

Polyimide

Notes

820