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An economical, compact inductively coupled plasma source.

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H. U. Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by H. U. Li returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
2Fabrication and Characterization of Flexible Thin Film Transistors on Thin Solution-Cast Substrates