Publication Information

Title:
Oxide semiconductor thin film transistors on thin solution-cast flexible substrates
Type:
Journal
Info:
IEEE Electron Device Letters (Volume: 36, Issue: 1)
Date:
2014-12-22

Author Information

Name Institution
H. U. LiThe Pennsylvania State University

Films

Plasma ZnO


Plasma Al2O3


Thermal Al2O3


Film/Plasma Properties

Substrates

Polyimide

Keywords

Flexible Circuits

Notes

PEALD Al2O3 and ZnO for flexible electronics.
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