Publication Information

Title: Oxide semiconductor thin film transistors on thin solution-cast flexible substrates

Type: Journal

Info: IEEE Electron Device Letters (Volume: 36, Issue: 1)

Date: 2014-12-22

DOI: http://dx.doi.org/10.1109/LED.2014.2371011

Author Information

Name

Institution

The Pennsylvania State University

Films

Plasma ZnO using Custom

Deposition Temperature = 200C

557-20-0

10024-97-2

Plasma Al2O3 using Custom

Deposition Temperature = 200C

75-24-1

124-38-9

Thermal Al2O3 using Custom

Deposition Temperature = 200C

75-24-1

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Polyimide

Keywords

Flexible Circuits

Notes

PEALD Al2O3 and ZnO for flexible electronics.

272



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