Publication Information

Title:
ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
Type:
Journal
Info:
Phys. Status Solidi A 2019, 1900256
Date:
2019-07-02

Author Information

Name Institution
Julian PilzGraz University of Technology
Alberto PerrottaGraz University of Technology
G√ľnther LeisingGraz University of Technology
Anna Maria CocliteGraz University of Technology

Films

Plasma ZnO


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Absorption Edges
Analysis: Ellipsometry

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy

Characteristic: Absorption Edges
Analysis: UV-VIS Spectroscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe

Substrates

Si(100)
Quartz
Glass

Keywords

Notes

1527