plasma-ald.com
  • PEALD Publication Database
    Films Precursors Hardware Authors Film and Plasma Characteristics Theses Multi-factor Search
  • Mark's LinkedIn Profile
  • Contact Us
  • ALD Links
The publication database currently has 1559 entries.
Search from:
192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses

Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


ALD Links
Contact Us
Advertising
LinkedIn Profile

Recent Database Additions
Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
Search 1559 plasma ALD publications by:
192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics

Alberto Perrotta Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alberto Perrotta returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
2Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
3Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
4Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
5On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
6Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
7Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
8ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"

© 2014-2021 plasma-ald.com

Popular Films
NbN
AlN
Ag
GaN
SiO2

Recently Added Films
RuTa
RuC
GaAs
LiNiOx
FeSnO

Popular Precursors
Bis(DiEthylAmido)Silane
Dicobalt Hexacarbonyl Tert-ButylAcetylene
Tris(DiMethylAmido) Cyclopentadienyl Hafnium
Tris(DiEthylamido) (Tert-Butylimido) Niobium
Trimethoxy(pentamethylcyclopentadienyl) Titanium

Top Authors
Erwin (W.M.M.) Kessels
Hyeongtag Jeon
Hyungjun Kim
Mauritius C. M. (Richard) van de Sanden
Christophe Detavernier