November 2022 Stats

The publication database currently has 1655 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5090 Authors

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2021 Year in Review

Recent Database Additions

Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films

Alberto Perrotta Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alberto Perrotta returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
2	Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
3	Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
4	Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
5	On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
6	Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
7	Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
8	ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"