Publication Information

Title:
Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
Type:
Journal
Info:
Crystals 2020, 10(4), 291
Date:
2020-04-08

Author Information

Name Institution
Alberto PerrottaGraz University of Technology
Julian PilzGraz University of Technology
Roland ReselGraz University of Technology
Oliver WerzerUniversity of Graz
Anna Maria CocliteGraz University of Technology

Films

Plasma ZnO


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity

Characteristic: Electron Concentration
Analysis: XRR, X-Ray Reflectivity

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Chemical Composition, Impurities
Analysis: XRF, X-Ray Fluorescence

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

Si with native oxide

Keywords

Notes

1487