Search 1528 plasma ALD publications by:
Search 1528 plasma ALD publications by:
Custom Direct Capacitively Coupled Plasma Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using Custom Direct Capacitively Coupled Plasma hardware returned 74 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |