Custom Direct Capacitively Coupled Plasma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Direct Capacitively Coupled Plasma hardware returned 85 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications
2Optical in situ monitoring of plasma-enhanced atomic layer deposition process
3Plasma-Enhanced Atomic-Layer Deposition of a HfO2 Gate Dielectric
4Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
5Highly Conductive HfNx Films Prepared by Plasma-Assisted Atomic Layer Deposition
6Investigation of a Two-Layer Gate Insulator Using Plasma-Enhanced ALD for Ultralow Temperature Poly-Si TFTs
7Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
8Multiscale modeling for SiO2 atomic layer deposition for high-aspect-ratio hole patterns
9Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
10Interfacial Layer Properties of HfO2 Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
11Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
12Stabilization of Al2O3 gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment
13Characteristics of HfO2 thin films grown by plasma atomic layer deposition
14Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
15Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
16Atomic layer deposited HfO2/HfSixOyNz stacked gate dielectrics for metal-oxide-semiconductor structures
17Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
18A study on film thickness control of vertical flow showerhead reactor for RF plasma deposition
19Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
20Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al2O3 and ZnO for Transparent Thin Film Transistor Applications
21Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
22Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films
23Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
24Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
25Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
26An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
27Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition
28Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
29Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization
30PEALD of Zirconium Oxide Using Tetrakis(ethylmethylamino)zirconium and Oxygen
31Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
32High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal-Organic Silicon Precursor and Oxygen Radical
33An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
34Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
35Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
36A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition
37Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
38Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
39Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
40Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
41Carbon content control of silicon oxycarbide film with methane containing plasma
42Formation of Tantalum Carbide and Nitride Phases in Atomic Layer Deposition Using Hydrogen Plasma and tert-Butylimidotris( diethylamido)-tantalum (TBTDET), and its Effect on Material Properties
43Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
44Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
45Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics
46Antioxidation properties of Ti0.83Al0.17N prepared using plasma-enhanced atomic layer deposition
47Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
48Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method
49Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
50Growth characteristics and film properties of plasma-enhanced and thermal atomic-layer-deposited magnesium oxide thin films prepared using bis(ethylcyclopentadienyl)magnesium precursor
51GeSbTe deposition for the PRAM application
52Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
53Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum
54Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
55Wet Chemical Oxidation to Improve Interfacial Properties of Al2O3/Si and Interface Analysis of Al2O3/SiOx/Si Structure Using Surface Carrier Lifetime Simulation and Capacitance-Voltage Measurement
56Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent
57Formation of aluminum nitride thin films as gate dielectrics on Si(100)
58A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films
59Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
60Characteristics of an Al2O3 Thin Film Deposited by a Plasma Enhanced Atomic Layer Deposition Method Using N2O Plasma
61Influence of Precursor Density and Conversion Time on the Orientation of Vapor-Deposited ZIF-8
62Growth mechanism and diffusion barrier property of plasma-enhanced atomic layer deposition Ti-Si-N thin films
63Plasma-Enhanced Atomic Layer Deposition of SrTa2O6 Thin Films Using Sr[Ta(OC2H5)5(OC2H4OCH3)]2 as Precursor
64SiCxNy-based resistive and threshold switching by using single precursor plasma-enhanced atomic layer deposition
65Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates
66Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
67Composition, structure, and electrical characteristics of HfO2 gate dielectrics grown using the remote- and direct-plasma atomic layer deposition methods
68Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
69ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
70Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
71Investigating the TiN film quality and growth behavior for plasma-enhanced atomic layer deposition using TiCl4 and N2/H2/Ar radicals
72Self-assembled monolayers as a defect sealant of Al2O3 barrier layers grown by atomic layer deposition
73Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
74Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia
75Film Uniformity in Atomic Layer Deposition
76Characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition using O2 plasma and N2O plasma
77Improved stability of electrical properties of nitrogen-added Al2O3 films grown by PEALD as gate dielectric
78Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
79Thermodynamic properties and interfacial layer characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition
80Plasma-Enhanced Atomic Layer Deposition of TaN Thin Films Using Tantalum-Pentafluoride and N2/H2/Ar Plasma
81Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
82Influence of Working Pressure on the Al2O3 Film Properties in Plasma-Enhanced Atomic Layer Deposition
83Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
84Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
85Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films